Scanning Electron Microscopy with Energy Dispersive X-Ray Spectroscopy (SEM/EDX or SEM/EDS) is one of the best known and most widely-used of the surface analytical techniques.
The advantages include incredibly high resolution and depth of field as well as the ability to determine elemental composition of surface areas, particle populations and individual particles (these can be sorted into classes by their metallurgy with the approximate grade of steel or other alloy suggested).
This analysis can also be performed on surface deposits or minute quantities of contaminants.
Among the disadvantages are the higher cost and the inability to differentiate organic compounds.
The following images show examples of SEM scans of typical debris.
Debris on a woven filter substrate.
Fractured particle on a membrane filter
A particle of pollen
A field of typical debris, including wear particles, rods/fibres and other miscellaneous debris
An elemental map of a field of particulate debris